组分与浓度 |
稀释气 |
备注 |
CH3Br 0.2～0.6% |
Kr Ar N2 |
充装容器和充装量根据用户要求配制 |
CH3Br 0.1～0.3% Kr 10～30% |
N2 |
CH3Br 0.2～06% Kr 15～50 |
Ar |
CH3Br 0.2～0.5% Kr 10～30% N2 10～40% |
Ar |
CH3Br 0.2～0.3% Kr 30% Ar 20 |
N2 |
CH3Br 0.2～0.5% N2 15% |
Ar |
CH3Br 0.3～0.5% CH3Cl 0.3～0.5% |
Ar |
CH3Br 0.2～0.5% CH3Cl 0.1～0.5% Kr 10～20% |
Ar |
CH3Br 0.1～0.5% CH2Cl2 0.02～0.05% |
Kr，N2 |
CH3Br 0.05～0.1% CH2Cl2 0.01～0.02% Ar 45% |
N2 |
CH2Cl2 0.1～2% |
Kr |
CH2ClBr 0.02% Ar 10% |
Kr |
CH3Br 0.1～0.3% CHCl2Br 0.1～0.7% CH2ClBr 0.1～0.3% |
Kr |
CH3Br 0.3～0.5% CH2Cl2 0.02～0.04% H2 5% |
N2 |
Kr 30～75 |
Ar |
Kr 0.5～5% |
Ar |
Ne 50～75% |
Ar |
Kr 3～8% N2 20% |
Ar |
C2H5I 0.1～2% |
Kr
|
